Inventor
SONG HYONSEOK
KR2 patents
Patents
2 patentsUS11467484B2Oct 11, 2022
Method for inspecting a reticle, a method for manufacturing a reticle, and a method for manufacturing a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD4 citations67
US11726398B2Aug 15, 2023
Method for inspecting a reticle, a method for manufacturing a reticle, and a method for manufacturing a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations56