Inventor
FENG TUNG-HUNG
TW10 patents
⚠️ This page may combine multiple inventors who share the name “FENG TUNG-HUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
9 patentsUS11798800B2Oct 24, 2023
Method and apparatus for solvent recycling
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12145087B2Nov 19, 2024
Device for applying magnetic field to a filter for reducing metallic contaminants
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11666838B2Jun 6, 2023
Device for applying magnetic field to a filter for reducing metallic contaminants
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12362179B2Jul 15, 2025
Method and apparatus for coating photo resist over a substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11955335B2Apr 9, 2024
Method and apparatus for coating photo resist over a substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US12557607B2Feb 17, 2026
Photoresist and formation method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US12512319B2Dec 30, 2025
Photoresist and formation method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US12087580B2Sep 10, 2024
Method of manufacturing semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US11545361B2Jan 3, 2023
Method and apparatus for coating photo resist over a substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47