Inventor
LEE HUI-CHUN
TW17 patents
⚠️ This page may combine multiple inventors who share the name “LEE HUI-CHUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
14 patentsUS11798800B2Oct 24, 2023
Method and apparatus for solvent recycling
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12145087B2Nov 19, 2024
Device for applying magnetic field to a filter for reducing metallic contaminants
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11666838B2Jun 6, 2023
Device for applying magnetic field to a filter for reducing metallic contaminants
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12362179B2Jul 15, 2025
Method and apparatus for coating photo resist over a substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11955335B2Apr 9, 2024
Method and apparatus for coating photo resist over a substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11908681B2Feb 20, 2024
Semiconductor fabricating system having hybrid brush assembly
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US11417512B2Aug 16, 2022
Method for cleaning semiconductor wafer backside surface by hybrid brush assembly
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations57
US12557607B2Feb 17, 2026
Photoresist and formation method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US12512319B2Dec 30, 2025
Photoresist and formation method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US12025919B2Jul 2, 2024
Method of storing photoresist coated substrates and semiconductor substrate container arrangement
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations54
US12532546B2Jan 20, 2026
Methods for reduction of photoresist defect
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US12087580B2Sep 10, 2024
Method of manufacturing semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US11545361B2Jan 3, 2023
Method and apparatus for coating photo resist over a substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47
US12506004B2Dec 23, 2025
Method of manufacturing a semiconductor device and semiconductor device manufacturing tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41