Inventor
JIANG SHENG-WEN
TW4 patents
Patents
4 patentsUS12362179B2Jul 15, 2025
Method and apparatus for coating photo resist over a substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11955335B2Apr 9, 2024
Method and apparatus for coating photo resist over a substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US12025919B2Jul 2, 2024
Method of storing photoresist coated substrates and semiconductor substrate container arrangement
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations54
US11545361B2Jan 3, 2023
Method and apparatus for coating photo resist over a substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47