Inventor
SUGIMORI KATSUHISA
JP4 patents
Patents
4 patentsUS9991110B2Jun 5, 2018
Method for manufacturing semiconductor wafer
SUMCO CORP7 citations78
US9956663B2May 1, 2018
Method for polishing silicon wafer
SUMCO CORP3 citations67
US11554458B2Jan 17, 2023
Polishing head, wafer polishing apparatus using the same, and wafer polishing method using the same
SUMCO CORP0 citations50
US11628534B2Apr 18, 2023
Silicon wafer single-side polishing method
SUMCO CORP0 citations47