Inventor
MA ZHENGUO
CN9 patents
⚠️ This page may combine multiple inventors who share the name “MA ZHENGUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD
5 patentsUS11948805B2Apr 2, 2024
Etching method, air-gap dielectric layer, and dynamic random-access memory
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations62
US11708636B2Jul 25, 2023
Reaction gas supply system and control method thereof
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations51
US11107699B2Aug 31, 2021
Semiconductor manufacturing process
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations51
US10937661B2Mar 2, 2021
Method for removing silicon oxide and integrated circuit manufacturing process
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations47
US11107706B2Aug 31, 2021
Gas phase etching device and gas phase etching apparatus
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations44