Inventor
TAKEICHI MASATOMO
JP5 patents
Patents
5 patentsUS6693297B2Feb 17, 2004
Thin film transistor formed by an etching process with high anisotropy
IBM13 citations83
US6654075B1Nov 25, 2003
Liquid crystal display device and method for fabricating the same
IBM17 citations82
US6798466B2Sep 28, 2004
Liquid crystal display device and method for fabricating the same
IBM6 citations71
US6258723B1Jul 10, 2001
Dry etching method and a TFT fabrication method
IBM12 citations71
US6815270B2Nov 9, 2004
Thin film transistor formed by an etching process with high anisotropy
IBM1 citations51