Inventor
AVULA AVINASH
US4 patents
Patents
4 patentsUS11302549B2Apr 12, 2022
Substrate vacuum transport and storage apparatus
APPLIED MATERIALS INC0 citations61
US10566226B2Feb 18, 2020
Multi-cassette carrying case
APPLIED MATERIALS INC1 citations61
US10347516B2Jul 9, 2019
Substrate transfer chamber
APPLIED MATERIALS INC0 citations51
US10153187B2Dec 11, 2018
Methods and apparatus for transferring a substrate
APPLIED MATERIALS INC1 citations51