Inventor
CONTARATO DEVIS
US6 patents
Patents
6 patentsUS10466212B2Nov 5, 2019
Scanning electron microscope and methods of inspecting and reviewing samples
KLA TENCOR CORP7 citations83
US9767986B2Sep 19, 2017
Scanning electron microscope and methods of inspecting and reviewing samples
KLA TENCOR CORP13 citations83
US10764527B2Sep 1, 2020
Dual-column-parallel CCD sensor and inspection systems using a sensor
KLA TENCOR CORP3 citations71
US10462391B2Oct 29, 2019
Dark-field inspection using a low-noise sensor
KLA TENCOR CORP5 citations70
US10778925B2Sep 15, 2020
Multiple column per channel CCD sensor architecture for inspection and metrology
KLA TENCOR CORP1 citations61
US10313622B2Jun 4, 2019
Dual-column-parallel CCD sensor and inspection systems using a sensor
KLA TENCOR CORP1 citations61