Inventor
KONO TAKUYA
JP28 patents
⚠️ This page may combine multiple inventors who share the name “KONO TAKUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
11 patentsUS6011611AJan 4, 2000
Method of measuring aberration of projection optics
TOSHIBA KK84 citations96
US7423728B2Sep 9, 2008
Immersion exposure method and apparatus, and manufacturing method of a semiconductor device
TOSHIBA KK15 citations84
US7556899B2Jul 7, 2009
System for controlling an overlay, method for controlling overlay, and method for manufacturing a semiconductor device
TOSHIBA KK12 citations83
US7260443B2Aug 21, 2007
System and program for making recipe and method for manufacturing products by using recipe
TOSHIBA KK19 citations82
US9377777B2Jun 28, 2016
Fine processing method, fine processing apparatus, and recording medium with fine processing program recorded thereon
TOSHIBA KK3 citations72
US7804580B2Sep 28, 2010
Immersion exposure apparatus and method of manufacturing a semiconductor device
TOSHIBA KK2 citations62
US7046334B2May 16, 2006
Displacement correction apparatus, exposure system, exposure method and a computer program product
TOSHIBA KK4 citations62
US7889313B2Feb 15, 2011
Immersion lithography apparatus and exposure method
TOSHIBA KK2 citations60
US7710583B2May 4, 2010
Surface position measuring system, exposure method and semiconductor device manufacturing method
TOSHIBA KK1 citations52
US7652747B2Jan 26, 2010
Immersion exposure method and immersion exposure apparatus which transfer image of pattern formed on mask onto substrate through immersion medium
TOSHIBA KK0 citations52
US7630052B2Dec 8, 2009
Exposure processing system, exposure processing method and method for manufacturing a semiconductor device
TOSHIBA KK1 citations51
MITSUBISHI ELECTRIC CORP
5 patentsUS11561786B2Jan 24, 2023
Update management device, update management system, and update management method
MITSUBISHI ELECTRIC CORP1 citations62
US12164293B2Dec 10, 2024
Remote operation device and remote operation method
MITSUBISHI ELECTRIC CORP1 citations57
US12555215B2Feb 17, 2026
Video data collection and analysis device
MITSUBISHI ELECTRIC CORP0 citations52
US12291205B2May 6, 2025
Vehicle control device and vehicle control method
MITSUBISHI ELECTRIC CORP0 citations52
US12235640B2Feb 25, 2025
Vehicle control device and vehicle control method
MITSUBISHI ELECTRIC CORP0 citations46