P

Inventor

KONO TAKUYA

JP28 patents
⚠️ This page may combine multiple inventors who share the name “KONO TAKUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOSHIBA KK

11 patents
US6011611AJan 4, 2000

Method of measuring aberration of projection optics

TOSHIBA KK84 citations96
US7423728B2Sep 9, 2008

Immersion exposure method and apparatus, and manufacturing method of a semiconductor device

TOSHIBA KK15 citations84
US7556899B2Jul 7, 2009

System for controlling an overlay, method for controlling overlay, and method for manufacturing a semiconductor device

TOSHIBA KK12 citations83
US7260443B2Aug 21, 2007

System and program for making recipe and method for manufacturing products by using recipe

TOSHIBA KK19 citations82
US9377777B2Jun 28, 2016

Fine processing method, fine processing apparatus, and recording medium with fine processing program recorded thereon

TOSHIBA KK3 citations72
US7804580B2Sep 28, 2010

Immersion exposure apparatus and method of manufacturing a semiconductor device

TOSHIBA KK2 citations62
US7046334B2May 16, 2006

Displacement correction apparatus, exposure system, exposure method and a computer program product

TOSHIBA KK4 citations62
US7889313B2Feb 15, 2011

Immersion lithography apparatus and exposure method

TOSHIBA KK2 citations60
US7710583B2May 4, 2010

Surface position measuring system, exposure method and semiconductor device manufacturing method

TOSHIBA KK1 citations52
US7652747B2Jan 26, 2010

Immersion exposure method and immersion exposure apparatus which transfer image of pattern formed on mask onto substrate through immersion medium

TOSHIBA KK0 citations52
US7630052B2Dec 8, 2009

Exposure processing system, exposure processing method and method for manufacturing a semiconductor device

TOSHIBA KK1 citations51

MITSUBISHI ELECTRIC CORP

5 patents

AISAN IND

4 patents

CANON KK

2 patents

MURATA MANUFACTURING CO

2 patents

NAKAGAWA YASUTADA

1 patent

INANAMI RYOICHI

1 patent

KIOXIA CORP

1 patent

SUZUKI MASATO

1 patent