Inventor

SALDANA MIGUEL

US4 patents

⚠️ This page may combine multiple inventors who share the name “SALDANA MIGUEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US7025854B2Apr 11, 2006

Method and apparatus for aligning and setting the axis of rotation of spindles of a multi-body system

LAM RES CORP6 citations72

US6579407B1Jun 17, 2003

Method and apparatus for aligning and setting the axis of rotation of spindles of a multi-body system

LAM RES CORP3 citations61

EUGENUS INC

2 patents

US12325914B2Jun 10, 2025

Precursor delivery system and method for cyclic deposition

EUGENUS INC1 citations58

US11459654B2Oct 4, 2022

Liquid precursor injection for thin film deposition

EUGENUS INC0 citations47