Inventor

KONISHI FUMIYA

JP3 patents

Patents

3 patents

US4298803ANov 3, 1981

Process and apparatus for making fine-scale patterns

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD28 citations73

US4101772AJul 18, 1978

Ion-beam etching method and an apparatus therefor

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD8 citations66

US4189639AFeb 19, 1980

Process for analyzing charged particles

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD5 citations61