Inventor

MUROBAYASHI MASAKI

JP9 patents

⚠️ This page may combine multiple inventors who share the name “MUROBAYASHI MASAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KOKUSAI ELECTRIC CORP

7 patents

US11905596B2Feb 20, 2024

Method of manufacturing semiconductor device, and recording medium

KOKUSAI ELECTRIC CORP2 citations72

US12195854B2Jan 14, 2025

Substrate processing apparatus, method of processing substrate, method of manufacturing semiconductor device, and recording medium

KOKUSAI ELECTRIC CORP0 citations62

US11155922B2Oct 26, 2021

Method of manufacturing semiconductor device, and recording medium

KOKUSAI ELECTRIC CORP0 citations62

US12249485B2Mar 11, 2025

Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium

KOKUSAI ELECTRIC CORP0 citations61

US11837440B2Dec 5, 2023

Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium

KOKUSAI ELECTRIC CORP1 citations61

US11145491B2Oct 12, 2021

Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

KOKUSAI ELECTRIC CORP1 citations61

US12230474B2Feb 18, 2025

Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium

KOKUSAI ELECTRIC CORP0 citations50

HITACHI INT ELECTRIC INC

2 patents

US6658321B2Dec 2, 2003

Substrate processing method and apparatus

HITACHI INT ELECTRIC INC9 citations72

US11384431B2Jul 12, 2022

Substrate processing apparatus

HITACHI INT ELECTRIC INC1 citations61