Inventor
SUN GOW-WEI
TW3 patents
Patents
3 patentsUS6410422B1Jun 25, 2002
Method of forming a local interconnect contact opening
UNITED MICROELECTRONICS CORP11 citations69
US6509228B1Jan 21, 2003
Etching procedure for floating gate formation of a flash memory device
UNITED MICROELECTRONICS CORP7 citations65
US6479307B2Nov 12, 2002
Method of monitoring loss of silicon nitride
UNITED MICROELECTRONICS CORP0 citations36