Inventor
UCHIDA KOUHEI
JP3 patents
Patents
3 patentsUS12243778B2Mar 4, 2025
Self-aligned semiconductor device contacts having widths less than minimum lithography limits
SEMICONDUCTOR COMPONENTS IND LLC0 citations56
US11876018B2Jan 16, 2024
Self-aligned trench MOSFET contacts having widths less than minimum lithography limits
SEMICONDUCTOR COMPONENTS IND LLC0 citations56
US10892188B2Jan 12, 2021
Self-aligned trench MOSFET contacts having widths less than minimum lithography limits
SEMICONDUCTOR COMPONENTS IND LLC1 citations56