Inventor

FURIHATA JUN-ICHIRO

JP2 patents

Patents

2 patents

US6461939B1Oct 8, 2002

SOI wafers and methods for producing SOI wafer

SHINETSU HANDOTAI KK42 citations91

US6716722B1Apr 6, 2004

Method of producing a bonded wafer and the bonded wafer

SHINETSU HANDOTAI KK19 citations89