Inventor
MATSUKAWA TAKUYA
JP3 patents
Patents
3 patentsUS7589335B2Sep 15, 2009
Charged-particle beam pattern writing method and apparatus and software program for use therein
NUFLARE TECHNOLOGY INC12 citations80
US7598504B2Oct 6, 2009
Writing error diagnosis method for charged particle beam photolithography apparatus and charged particle beam photolithography apparatus
NUFLARE TECHNOLOGY INC4 citations57
US7900185B2Mar 1, 2011
Pattern writing circuit self-diagnosis method for charged beam photolithography apparatus and charged beam photolithography apparatus
NUFLARE TECHNOLOGY INC1 citations47