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Inventor
OGAWA SHIZUE
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “OGAWA SHIZUE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
1 patent
US7958842B2
Jun 14, 2011
Substrate processing apparatus
HITACHI INT ELECTRIC INC
2 citations
60
OGAWA SHIZUE
1 patent
US8518182B2
Aug 27, 2013
Substrate processing apparatus
OGAWA SHIZUE
2 citations
54