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Inventor
SCHOENE GERD
DE
2 patents
Patents
2 patents
US8158514B2
Apr 17, 2012
Method for producing vertical electrical contact connections in semiconductor wafers
KRUEGER OLAF
21 citations
84
US8455355B2
Jun 4, 2013
Method for producing through-contacts in semi-conductor wafers via production of through-plated holes
KRUEGER OLAF
0 citations
31