Inventor
LEWIS JOHN S
8 patents
⚠️ This page may combine multiple inventors who share the name “LEWIS JOHN S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LEWIS JOHN S
3 patentsAPPLIED MATERIALS INC
3 patentsUS7980000B2Jul 19, 2011
Vapor dryer having hydrophilic end effector
APPLIED MATERIALS INC13 citations79
US6797620B2Sep 28, 2004
Method and apparatus for improved electroplating fill of an aperture
APPLIED MATERIALS INC12 citations73
US7201808B2Apr 10, 2007
Method and apparatus for rotating a semiconductor substrate
APPLIED MATERIALS INC4 citations61