Inventor

STEINER ULLRICH

DE3 patents

⚠️ This page may combine multiple inventors who share the name “STEINER ULLRICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNIV MASSACHUSETTS

2 patents

US6391217B2May 21, 2002

Methods and apparatus for forming submicron patterns on films

UNIV MASSACHUSETTS206 citations94

US7014786B2Mar 21, 2006

Methods and apparatus for forming submicron patterns on films

UNIV MASSACHUSETTS1 citations45

UNI KONSTANZ

1 patent

US6605229B2Aug 12, 2003

Process for producing antireflection coatings

UNI KONSTANZ17 citations76