Inventor

SAKTHIVEL PALANIKUMARA

US2 patents

⚠️ This page may combine multiple inventors who share the name “SAKTHIVEL PALANIKUMARA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AXCELIS TECH INC

1 patent

US7794663B2Sep 14, 2010

Method and system for detection of solid materials in a plasma using an electromagnetic circuit

AXCELIS TECH INC2 citations52

PINGREE JR RICHARD E

1 patent

US8119413B2Feb 21, 2012

Method and system for detection of solid materials in a plasma using an electromagnetic circuit

PINGREE JR RICHARD E0 citations35