Inventor

SHIBUYA ISAMU

JP2 patents

Patents

2 patents

US5929976AJul 27, 1999

Process for exposing a peripheral area of a wafer and a device for executing the process

USHIO ELECTRIC INC75 citations92

US6318538B1Nov 20, 2001

Device for treatment of a substrate

USHIO ELECTRIC INC9 citations66