Inventor
SHIBATOMI AKIHIRO
JP11 patents
⚠️ This page may combine multiple inventors who share the name “SHIBATOMI AKIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOIKE JUNICHI
9 patentsUS8163649B2Apr 24, 2012
Copper interconnection structure, semiconductor device, and method for forming copper interconnection structure
KOIKE JUNICHI16 citations92
US8324730B2Dec 4, 2012
Copper interconnection structure and method for forming copper interconnections
KOIKE JUNICHI11 citations83
US8258626B2Sep 4, 2012
Copper interconnection, method for forming copper interconnection structure, and semiconductor device
KOIKE JUNICHI6 citations83
US8112885B2Feb 14, 2012
Method for forming copper interconnection structures
KOIKE JUNICHI6 citations83
US8531033B2Sep 10, 2013
Contact plug structure, semiconductor device, and method for forming contact plug
KOIKE JUNICHI9 citations78
US8580688B2Nov 12, 2013
Copper interconnection structure and method for forming copper interconnections
KOIKE JUNICHI5 citations72
US9082821B2Jul 14, 2015
Method for forming copper interconnection structures
KOIKE JUNICHI0 citations51
US8420535B2Apr 16, 2013
Copper interconnection, method for forming copper interconnection structure, and semiconductor device
KOIKE JUNICHI0 citations51
US8169079B2May 1, 2012
Copper interconnection structures and semiconductor devices
KOIKE JUNICHI0 citations51