Inventor · disambiguated record
Naoto Yonemaru
Also filed as: YONEMARU NAOTO
1 granted patent·2 pending applications·0 citations·filing 2021–2023
10Inventor score
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3 records- 0153US2024419064A1Phase shift mask and method for manufacturing phase shift maskTOPPAN PHOTOMASK CO LTD·Filed 2023·Application pending·0 cites
- 0251US12326656B2Mask blank and method of manufacturing photomaskHOYA CORP·Filed 2021·Granted Jun 10, 2025·0 cites·10 claims
- 0346US2025147408A1Phase shift mask and method for manufacturing phase shift maskTEKSCEND PHOTOMASK CORP·Filed 2023·Application pending·0 cites
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