Inventor · disambiguated record
Kazuyuki Maetoko
Also filed as: MAETOKO KAZUYUKI
5 granted patents·1 pending application·101 citations·filing 1995–2006
78Inventor score
Top patents by PatentIndex Score
6 records- 0184US6569577B1Phase-shift photo mask blank, phase-shift photo mask and method for fabricating semiconductor devicesULVAC COATING CORP·Filed 2000·Granted May 27, 2003·40 cites·17 claims
- 0284US5605776APhase-shifting photomask blank, phase-shifting photomask, and method of manufacturing themULVAC COATING CORP·Filed 1995·Granted Feb 25, 1997·58 cites·28 claims
- 0361US7282308B2Phase shifter film and process for the sameRENESAS TECH CORP·Filed 2006·Granted Oct 16, 2007·0 cites·3 claims
- 0455US7090947B2Phase shifter film and process for the sameRENESAS TECH CORP·Filed 2001·Granted Aug 15, 2006·3 cites·54 claims
- 0534US6984473B2Method of patterning a mask blankMITSUBISHI ELECTRIC CORP·Filed 2002·Granted Jan 10, 2006·0 cites·5 claims
- 0632US2003108803A1Method of manufacturing phase shift mask, phase shift mask and apparatusMITSUBISHI ELECTRIC CORP·Filed 2002·Application pending·0 cites
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