Inventor · disambiguated record

Sheng-Min Chuang

Also filed as: CHUANG SHENG-MIN

2 granted patents·1 citations·filing 2014–2014

31Inventor score

Technology areasG03F H10P

Files withTAIWAN SEMICONDUCTOR MFG CO LTD2

Top patents by PatentIndex Score

2 records

0160US9651870B2Method and tool of lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted May 16, 2017·1 cites·15 claims
0240US9698014B2Photoresist composition to reduce photoresist pattern collapseTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Jul 4, 2017·0 cites·20 claims

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