Inventor · disambiguated record

Nicolas Schmidts

Also filed as: SCHMIDTS NICOLAS

1 granted patent·2 citations·filing 2011–2011

18Inventor score

Technology areasG03F

Files withSCHMIDTS NICOLAS1

Top patents by PatentIndex Score

1 record

0162US9482959B2EUV microlithography illumination optical system and EUV attenuator for sameSCHMIDTS NICOLAS·Filed 2011·Granted Nov 1, 2016·2 cites·24 claims

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