Inventor

COCHRAN IAN

US2 patents

Patents

2 patents

US11004755B2May 11, 2021

Apparatus and method for the minimization of undercut during a UBM etch process

VEECO INSTR INC2 citations67

US11069583B2Jul 20, 2021

Apparatus and method for the minimization of undercut during a UBM etch process

VEECO INSTR INC0 citations46