Inventor
SWALLOW JAMES
US5 patents
⚠️ This page may combine multiple inventors who share the name “SWALLOW JAMES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VEECO INSTR INC
3 patentsUS11004755B2May 11, 2021
Apparatus and method for the minimization of undercut during a UBM etch process
VEECO INSTR INC2 citations67
US11069583B2Jul 20, 2021
Apparatus and method for the minimization of undercut during a UBM etch process
VEECO INSTR INC0 citations46
US11232958B2Jan 25, 2022
System and method for self-cleaning wet treatment process
VEECO INSTR INC0 citations40