Inventor

WERNBERG ALEX A

US3 patents

Patents

3 patents

US5266355ANov 30, 1993

Chemical vapor deposition of metal oxide films

EASTMAN KODAK CO64 citations94

US5271957ADec 21, 1993

Chemical vapor deposition of niobium and tantalum oxide films

EASTMAN KODAK CO28 citations90

US5258204ANov 2, 1993

Chemical vapor deposition of metal oxide films from reaction product precursors

EASTMAN KODAK CO21 citations90