Inventor

NAGASE KYOKO

JP3 patents

Patents

3 patents

US5468590ANov 21, 1995

Positive resist composition

SUMITOMO CHEMICAL CO24 citations91

US5429904AJul 4, 1995

Positive resist composition

SUMITOMO CHEMICAL CO21 citations91

US5451484ASep 19, 1995

Positive resist composition

SUMITOMO CHEMICAL CO9 citations71