Inventor

VAENKATESAN VIDYA

NL2 patents

⚠️ This page may combine multiple inventors who share the name “VAENKATESAN VIDYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

1 patent

US11287748B2Mar 29, 2022

Guided patterning device inspection

ASML NETHERLANDS BV0 citations58

KIERS ANTOINE GASTON MARIE

1 patent

US8233155B2Jul 31, 2012

Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method

KIERS ANTOINE GASTON MARIE4 citations45