Inventor

MANOHAR ABHISHEK

US3 patents

⚠️ This page may combine multiple inventors who share the name “MANOHAR ABHISHEK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHEN FENG

1 patent

US8551885B2Oct 8, 2013

Method for reducing tungsten roughness and improving reflectivity

CHEN FENG68 citations96

GUAN YAN

1 patent

US8853080B2Oct 7, 2014

Method for depositing tungsten film with low roughness and low resistivity

GUAN YAN38 citations90

WONGSENAKHUM PANYA

1 patent

US8262800B1Sep 11, 2012

Methods and apparatus for cleaning deposition reactors

WONGSENAKHUM PANYA21 citations87