Inventor
LEE SHING-LONG
TW8 patents
⚠️ This page may combine multiple inventors who share the name “LEE SHING-LONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
7 patentsUS5872061AFeb 16, 1999
Plasma etch method for forming residue free fluorine containing plasma etched layers
TAIWAN SEMICONDUCTOR MFG121 citations97
US5943582AAug 24, 1999
Method for forming DRAM stacked capacitor
TAIWAN SEMICONDUCTOR MFG26 citations91
US5783482AJul 21, 1998
Method to prevent oxide peeling induced by sog etchback on the wafer edge
TAIWAN SEMICONDUCTOR MFG25 citations90
US6245666B1Jun 12, 2001
Method for forming a delamination resistant multi-layer dielectric layer for passivating a conductor layer
TAIWAN SEMICONDUCTOR MFG20 citations87
US5877092AMar 2, 1999
Method for edge profile and design rules control
TAIWAN SEMICONDUCTOR MFG17 citations82
US6926590B1Aug 9, 2005
Method of improving device performance
TAIWAN SEMICONDUCTOR MFG8 citations71
US7511936B2Mar 31, 2009
Method and apparatus for dynamic plasma treatment of bipolar ESC system
TAIWAN SEMICONDUCTOR MFG1 citations43