Inventor · disambiguated record

Ethan A. Wright

Also filed as: WRIGHT ETHAN A · WRIGHT ETHAN ADAM

1 granted patent·1 pending application·1 citations·filing 2006–2014

20Inventor score

Technology areasH01J H10P

Files withVARIAN SEMICONDUCTOR EQUIPMENT1 VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1

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2 records

0167US9929015B2High efficiency apparatus and method for depositing a layer on a three dimensional structureVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Mar 27, 2018·1 cites·15 claims
0243US2007137576A1Technique for providing an inductively coupled radio frequency plasma flood gunVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Application pending·0 cites

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