Inventor
CHOI GYUWAN
KR2 patents
Patents
2 patentsUS9941135B2Apr 10, 2018
Methods of forming a hard mask layer and of fabricating a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD2 citations64
US8883596B2Nov 11, 2014
Semiconductor device with vertical channel transistor and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD2 citations57