Inventor
LIN HSIN-HUI
TW3 patents
Patents
3 patentsUS11527543B2Dec 13, 2022
Polysilicon removal in word line contact region of memory devices
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations70
US12376297B2Jul 29, 2025
Polysilicon removal in word line contact region of memory devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12041771B2Jul 16, 2024
Polysilicon removal in word line contact region of memory devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60