P

Inventor

NOZAKI KOJI

JP83 patents
⚠️ This page may combine multiple inventors who share the name “NOZAKI KOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FUJITSU LTD

42 patents
US6013416AJan 11, 2000

Chemically amplified resist compositions and process for the formation of resist patterns

FUJITSU LTD164 citations99
US5968713AOct 19, 1999

Chemically amplified resist compositions and process for the formation of resist patterns

FUJITSU LTD165 citations99
US7608386B2Oct 27, 2009

Resist cover film-forming material, process for forming resist pattern, semiconductor device and process for manufacturing the same

FUJITSU LTD79 citations98
US6329125B2Dec 11, 2001

Chemically amplified resist compositions and process for the formation of resist patterns

FUJITSU LTD154 citations98
US6200725B1Mar 13, 2001

Chemically amplified resist compositions and process for the formation of resist patterns

FUJITSU LTD105 citations97
US6027856AFeb 22, 2000

Negative-type resist composition and process for forming resist patterns

FUJITSU LTD67 citations96
US5585219ADec 17, 1996

Resist composition and process for forming resist pattern

FUJITSU LTD96 citations96
US5399647AMar 21, 1995

Photoresist composition of 1-(1'-cyanoethenyl)adamantane

FUJITSU LTD53 citations96
US8349536B2Jan 8, 2013

Dithiane derivative, polymer, resist composition, and method for manufacturing semiconductor device using such resist composition

FUJITSU LTD47 citations94
US6887644B1May 3, 2005

Polymer compound for a chemical amplification resist and a fabrication process of a semiconductor device using such a chemical amplification resist

FUJITSU LTD26 citations93
US6770417B2Aug 3, 2004

Negative resist composition, process for forming resist patterns, and process for manufacturing electron device

FUJITSU LTD20 citations93
US6656659B1Dec 2, 2003

Resist composition suitable for short wavelength exposure and resist pattern forming method

FUJITSU LTD19 citations93
US7338750B2Mar 4, 2008

Resist pattern thickness reducing material, resist pattern and process for forming thereof, and semiconductor device and process for manufacturing thereof

FUJITSU LTD25 citations92
US7189783B2Mar 13, 2007

Resist pattern thickening material, resist pattern and forming process thereof, and semiconductor device and manufacturing process thereof

FUJITSU LTD13 citations92
US6506534B1Jan 14, 2003

Negative resist composition, method for the formation of resist patterns and process for the production of electronic devices

FUJITSU LTD29 citations92
US5910392AJun 8, 1999

Resist composition, a process for forming a resist pattern and a process for manufacturing a semiconductor device

FUJITSU LTD46 citations92
US5585222ADec 17, 1996

Resist composition and process for forming resist pattern

FUJITSU LTD42 citations92
US6052261AApr 18, 2000

Method for manufacturing magnetoresistance head

FUJITSU LTD23 citations91
US5506088AApr 9, 1996

Chemically amplified resist composition and process for forming resist pattern using same

FUJITSU LTD23 citations89
US7585610B2Sep 8, 2009

Resist pattern thickening material and process for forming resist pattern, and semiconductor device and process for manufacturing the same

FUJITSU LTD9 citations84
US7416837B2Aug 26, 2008

Resist pattern-improving material and a method for preparing a resist pattern by using the same

FUJITSU LTD11 citations84
US7202289B2Apr 10, 2007

Biodegradable resin composition, filler therefor and molded article thereof

FUJITSU LTD17 citations84
US6844135B2Jan 18, 2005

Chemically amplified resist material and patterning method using same

FUJITSU LTD16 citations84
US6451501B1Sep 17, 2002

Acid sensitive copolymer, resist composition and resist pattern forming method

FUJITSU LTD14 citations84
US6200724B1Mar 13, 2001

Chemical amplification resist compositions and process for the formation of resist patterns

FUJITSU LTD16 citations84
US7592127B2Sep 22, 2009

Resist pattern thickening material, resist pattern and process for forming the same, and semiconductor device and process for manufacturing the same

FUJITSU LTD7 citations74
US7488569B2Feb 10, 2009

Negative resist composition, a method for forming a resist pattern thereof, and a method for fabricating a semiconductor device

FUJITSU LTD5 citations74
US7419894B2Sep 2, 2008

Gate electrode and manufacturing method thereof, and semiconductor device and manufacturing method thereof

FUJITSU LTD7 citations74
US6794112B2Sep 21, 2004

Negative resist composition, method for the formation of resist patterns and process for the production of electronic devices

FUJITSU LTD4 citations74
US6773867B2Aug 10, 2004

Negative resist composition, method for the formation of resist patterns and process for the production of electronic devices

FUJITSU LTD7 citations74
US5962191AOct 5, 1999

Resist compositions for forming resist patterns

FUJITSU LTD11 citations74
US5824452AOct 20, 1998

Resist compositions and process for the formation of resist patterns

FUJITSU LTD7 citations74
US5932014AAug 3, 1999

Apparatus for producing semiconductor device

FUJITSU LTD11 citations70
US5609688AMar 11, 1997

Apparatus for producing semiconductor device

FUJITSU LTD6 citations70
US8945822B2Feb 3, 2015

Resist pattern thickening material, method for forming resist pattern, semiconductor device and method for manufacturing the same

FUJITSU LTD2 citations63
US8349542B2Jan 8, 2013

Manufacturing process of semiconductor device

FUJITSU LTD2 citations63
US7897321B2Mar 1, 2011

Monomer, resin, resist composition using the resin, and method producing semiconductor device using the resist composition

FUJITSU LTD2 citations63
US7820367B2Oct 26, 2010

Resist pattern thickening material and process for forming resist pattern, and semiconductor device and process for producing the same

FUJITSU LTD4 citations63
US7799508B2Sep 21, 2010

Resist pattern thickening material and process for forming resist pattern, and semiconductor device and process for manufacturing the same

FUJITSU LTD3 citations63
US7744768B2Jun 29, 2010

Resist pattern thickening material, resist pattern and forming process thereof, and semiconductor device and manufacturing process thereof

FUJITSU LTD3 citations63
US7662539B2Feb 16, 2010

Resist pattern thickening material, process for forming resist pattern, and process for manufacturing semiconductor device

FUJITSU LTD6 citations63
US7625688B2Dec 1, 2009

Resist pattern thickening material, resist pattern and process for forming the same, and semiconductor device and process for manufacturing the same

FUJITSU LTD4 citations63

NOZAKI KOJI

3 patents

CENTRAL GLASS CO LTD

2 patents

HITACHI CONSTRUCTION MACHINERY

2 patents

ORIHASHI YOSHIHIKO

1 patent

Showing the top 50 of 83 patents by PatentIndex Score.