Inventor
NOZAKI KOJI
JP83 patents
⚠️ This page may combine multiple inventors who share the name “NOZAKI KOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
42 patentsUS6013416AJan 11, 2000
Chemically amplified resist compositions and process for the formation of resist patterns
FUJITSU LTD164 citations99
US5968713AOct 19, 1999
Chemically amplified resist compositions and process for the formation of resist patterns
FUJITSU LTD165 citations99
US7608386B2Oct 27, 2009
Resist cover film-forming material, process for forming resist pattern, semiconductor device and process for manufacturing the same
FUJITSU LTD79 citations98
US6329125B2Dec 11, 2001
Chemically amplified resist compositions and process for the formation of resist patterns
FUJITSU LTD154 citations98
US6200725B1Mar 13, 2001
Chemically amplified resist compositions and process for the formation of resist patterns
FUJITSU LTD105 citations97
US6027856AFeb 22, 2000
Negative-type resist composition and process for forming resist patterns
FUJITSU LTD67 citations96
US5585219ADec 17, 1996
Resist composition and process for forming resist pattern
FUJITSU LTD96 citations96
US5399647AMar 21, 1995
Photoresist composition of 1-(1'-cyanoethenyl)adamantane
FUJITSU LTD53 citations96
US8349536B2Jan 8, 2013
Dithiane derivative, polymer, resist composition, and method for manufacturing semiconductor device using such resist composition
FUJITSU LTD47 citations94
US6887644B1May 3, 2005
Polymer compound for a chemical amplification resist and a fabrication process of a semiconductor device using such a chemical amplification resist
FUJITSU LTD26 citations93
US6770417B2Aug 3, 2004
Negative resist composition, process for forming resist patterns, and process for manufacturing electron device
FUJITSU LTD20 citations93
US6656659B1Dec 2, 2003
Resist composition suitable for short wavelength exposure and resist pattern forming method
FUJITSU LTD19 citations93
US7338750B2Mar 4, 2008
Resist pattern thickness reducing material, resist pattern and process for forming thereof, and semiconductor device and process for manufacturing thereof
FUJITSU LTD25 citations92
US7189783B2Mar 13, 2007
Resist pattern thickening material, resist pattern and forming process thereof, and semiconductor device and manufacturing process thereof
FUJITSU LTD13 citations92
US6506534B1Jan 14, 2003
Negative resist composition, method for the formation of resist patterns and process for the production of electronic devices
FUJITSU LTD29 citations92
US5910392AJun 8, 1999
Resist composition, a process for forming a resist pattern and a process for manufacturing a semiconductor device
FUJITSU LTD46 citations92
US5585222ADec 17, 1996
Resist composition and process for forming resist pattern
FUJITSU LTD42 citations92
US6052261AApr 18, 2000
Method for manufacturing magnetoresistance head
FUJITSU LTD23 citations91
US5506088AApr 9, 1996
Chemically amplified resist composition and process for forming resist pattern using same
FUJITSU LTD23 citations89
US7585610B2Sep 8, 2009
Resist pattern thickening material and process for forming resist pattern, and semiconductor device and process for manufacturing the same
FUJITSU LTD9 citations84
US7416837B2Aug 26, 2008
Resist pattern-improving material and a method for preparing a resist pattern by using the same
FUJITSU LTD11 citations84
US7202289B2Apr 10, 2007
Biodegradable resin composition, filler therefor and molded article thereof
FUJITSU LTD17 citations84
US6844135B2Jan 18, 2005
Chemically amplified resist material and patterning method using same
FUJITSU LTD16 citations84
US6451501B1Sep 17, 2002
Acid sensitive copolymer, resist composition and resist pattern forming method
FUJITSU LTD14 citations84
US6200724B1Mar 13, 2001
Chemical amplification resist compositions and process for the formation of resist patterns
FUJITSU LTD16 citations84
US7592127B2Sep 22, 2009
Resist pattern thickening material, resist pattern and process for forming the same, and semiconductor device and process for manufacturing the same
FUJITSU LTD7 citations74
US7488569B2Feb 10, 2009
Negative resist composition, a method for forming a resist pattern thereof, and a method for fabricating a semiconductor device
FUJITSU LTD5 citations74
US7419894B2Sep 2, 2008
Gate electrode and manufacturing method thereof, and semiconductor device and manufacturing method thereof
FUJITSU LTD7 citations74
US6794112B2Sep 21, 2004
Negative resist composition, method for the formation of resist patterns and process for the production of electronic devices
FUJITSU LTD4 citations74
US6773867B2Aug 10, 2004
Negative resist composition, method for the formation of resist patterns and process for the production of electronic devices
FUJITSU LTD7 citations74
US5962191AOct 5, 1999
Resist compositions for forming resist patterns
FUJITSU LTD11 citations74
US5824452AOct 20, 1998
Resist compositions and process for the formation of resist patterns
FUJITSU LTD7 citations74
US5932014AAug 3, 1999
Apparatus for producing semiconductor device
FUJITSU LTD11 citations70
US5609688AMar 11, 1997
Apparatus for producing semiconductor device
FUJITSU LTD6 citations70
US8945822B2Feb 3, 2015
Resist pattern thickening material, method for forming resist pattern, semiconductor device and method for manufacturing the same
FUJITSU LTD2 citations63
US8349542B2Jan 8, 2013
Manufacturing process of semiconductor device
FUJITSU LTD2 citations63
US7897321B2Mar 1, 2011
Monomer, resin, resist composition using the resin, and method producing semiconductor device using the resist composition
FUJITSU LTD2 citations63
US7820367B2Oct 26, 2010
Resist pattern thickening material and process for forming resist pattern, and semiconductor device and process for producing the same
FUJITSU LTD4 citations63
US7799508B2Sep 21, 2010
Resist pattern thickening material and process for forming resist pattern, and semiconductor device and process for manufacturing the same
FUJITSU LTD3 citations63
US7744768B2Jun 29, 2010
Resist pattern thickening material, resist pattern and forming process thereof, and semiconductor device and manufacturing process thereof
FUJITSU LTD3 citations63
US7662539B2Feb 16, 2010
Resist pattern thickening material, process for forming resist pattern, and process for manufacturing semiconductor device
FUJITSU LTD6 citations63
US7625688B2Dec 1, 2009
Resist pattern thickening material, resist pattern and process for forming the same, and semiconductor device and process for manufacturing the same
FUJITSU LTD4 citations63
NOZAKI KOJI
3 patentsUS8088556B2Jan 3, 2012
Thiopyran derivative, polymer, resist composition, and method for manufacturing semiconductor device using such resist composition
NOZAKI KOJI46 citations97
US8080365B2Dec 20, 2011
Thiopyran derivative, polymer, resist composition, and method for manufacturing semiconductor device using such resist composition
NOZAKI KOJI46 citations97
US8334091B2Dec 18, 2012
Resist pattern swelling material, and method for patterning using same
NOZAKI KOJI7 citations83
CENTRAL GLASS CO LTD
2 patentsHITACHI CONSTRUCTION MACHINERY
2 patentsORIHASHI YOSHIHIKO
1 patentShowing the top 50 of 83 patents by PatentIndex Score.