Inventor

CANAVELLO BENJAMIN J

3 patents

Patents

3 patents

US4212935AJul 15, 1980

Method of modifying the development profile of photoresists

IBM99 citations94

US4379833AApr 12, 1983

Self-aligned photoresist process

IBM25 citations80

US4259369AMar 31, 1981

Image hardening process

IBM8 citations71