Inventor

PARK PYENG-JAE

KR3 patents

⚠️ This page may combine multiple inventors who share the name “PARK PYENG-JAE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DNS KOREA CO LTD

1 patent

US6784106B2Aug 31, 2004

Wafer drying method

DNS KOREA CO LTD9 citations69

DNS KOREA LTD

1 patent

US6757989B2Jul 6, 2004

Wafer drying apparatus

DNS KOREA LTD7 citations65

SONG GIL-HUN

1 patent

US8282771B2Oct 9, 2012

Method of processing a substrate, spin unit for supplying processing materials to a substrate, and apparatus for processing a substrate having the same

SONG GIL-HUN6 citations62