P

Inventor

YABE SACHIKO

JP8 patents
⚠️ This page may combine multiple inventors who share the name “YABE SACHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OKI ELECTRIC IND CO LTD

5 patents
US7332405B2Feb 19, 2008

Method of forming alignment marks for semiconductor device fabrication

OKI ELECTRIC IND CO LTD8 citations73
US6809002B2Oct 26, 2004

Method of manufacturing an alignment mark

OKI ELECTRIC IND CO LTD8 citations72
US6349594B1Feb 26, 2002

Method of measuring film thickness distribution

OKI ELECTRIC IND CO LTD8 citations71
US7388651B2Jun 17, 2008

Focus monitoring method

OKI ELECTRIC IND CO LTD3 citations60
US6572285B2Jun 3, 2003

Photoresist developing nozzle, photoresist developing apparatus, and photoresist developing method

OKI ELECTRIC IND CO LTD2 citations60

NEC ELECTRONICS CORP

1 patent
US7439171B2Oct 21, 2008

Method for manufacturing electronic device

NEC ELECTRONICS CORP9 citations82

OKI SEMICONDUCTOR CO LTD

1 patent
US7745880B2Jun 29, 2010

Dielectric substrate with reflecting films

OKI SEMICONDUCTOR CO LTD0 citations51

NAKAMURA TOSHIYUKI

1 patent
US8076220B2Dec 13, 2011

Fabrication method for device structure having transparent dielectric substrate

NAKAMURA TOSHIYUKI0 citations50