Inventor

VAN KEMPEN ROBERTUS JACOBUS THEODORUS

NL3 patents

⚠️ This page may combine multiple inventors who share the name “VAN KEMPEN ROBERTUS JACOBUS THEODORUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US11621142B2Apr 4, 2023

Substrate positioning device and electron beam inspection tool

ASML NETHERLANDS BV0 citations48

US11302512B2Apr 12, 2022

Electron beam inspection apparatus stage positioning

ASML NETHERLANDS BV0 citations47

VERVOORDELDONK MICHAEL JOHANNES

1 patent

US8885147B2Nov 11, 2014

Lithographic apparatus and device manufacturing method

VERVOORDELDONK MICHAEL JOHANNES5 citations68