Inventor

QU WEIFENG

JP2 patents

Patents

2 patents

US6544656B1Apr 8, 2003

Production method for silicon wafer and silicon wafer

SHINETSU HANDOTAI KK127 citations96

US11761118B2Sep 19, 2023

Carbon-doped silicon single crystal wafer and method for manufacturing the same

SHINETSU HANDOTAI KK0 citations51