Inventor
HAYAMIZU YOSHINORI
JP11 patents
⚠️ This page may combine multiple inventors who share the name “HAYAMIZU YOSHINORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINETSU HANDOTAI KK
9 patentsUS6478883B1Nov 12, 2002
Silicon single crystal wafer, epitaxial silicon wafer, and methods for producing them
SHINETSU HANDOTAI KK84 citations97
US6544656B1Apr 8, 2003
Production method for silicon wafer and silicon wafer
SHINETSU HANDOTAI KK127 citations96
US6548035B1Apr 15, 2003
Silicon single crystal wafer for epitaxial wafer, epitaxial wafer, and methods for producing the same and evaluating the same
SHINETSU HANDOTAI KK30 citations92
US6140131AOct 31, 2000
Method and apparatus for detecting heavy metals in silicon wafer bulk with high sensitivity
SHINETSU HANDOTAI KK25 citations84
US5916824AJun 29, 1999
Etching method of silicon wafer surface and etching apparatus of the same
SHINETSU HANDOTAI KK17 citations82
US6277715B1Aug 21, 2001
Production method for silicon epitaxial wafer
SHINETSU HANDOTAI KK13 citations73
US7081422B2Jul 25, 2006
Manufacturing process for annealed wafer and annealed wafer
SHINETSU HANDOTAI KK8 citations72
US6858094B2Feb 22, 2005
Silicon wafer and silicon epitaxial wafer and production methods therefor
SHINETSU HANDOTAI KK6 citations72
US6544332B1Apr 8, 2003
Method for manufacturing silicon single crystal, silicon single crystal manufactured by the method, and silicon wafer
SHINETSU HANDOTAI KK6 citations63