Inventor
XU SONGLIN
US13 patents
⚠️ This page may combine multiple inventors who share the name “XU SONGLIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS6635578B1Oct 21, 2003
Method of operating a dual chamber reactor with neutral density decoupled from ion density
APPLIED MATERIALS INC615 citations98
US6352049B1Mar 5, 2002
Plasma assisted processing chamber with separate control of species density
APPLIED MATERIALS INC498 citations96
US7067432B2Jun 27, 2006
Methodology for in-situ and real-time chamber condition monitoring and process recovery during plasma processing
APPLIED MATERIALS INC29 citations92
US6008139ADec 28, 1999
Method of etching polycide structures
APPLIED MATERIALS INC31 citations92
US6544896B1Apr 8, 2003
Method for enhancing etching of TiSix
APPLIED MATERIALS INC16 citations80
US6808647B1Oct 26, 2004
Methodologies to reduce process sensitivity to the chamber condition
APPLIED MATERIALS INC6 citations61