Inventor
RAO SATYAVOLU PAPA
US3 patents
Patents
3 patentsUS6834117B1Dec 21, 2004
X-ray defect detection in integrated circuit metallization
TEXAS INSTRUMENTS INC31 citations90
US6579798B2Jun 17, 2003
Processes for chemical-mechanical polishing of a semiconductor wafer
TEXAS INSTRUMENTS INC13 citations79
US7745335B2Jun 29, 2010
Semiconductor device manufactured by reducing hillock formation in metal interconnects
TEXAS INSTRUMENTS INC1 citations49