Inventor
LO CHING-SHU
SG6 patents
⚠️ This page may combine multiple inventors who share the name “LO CHING-SHU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNITED MICROELECTRONICS CORP
3 patentsUS8938697B1Jan 20, 2015
Method of performing optical proximity correction for preparing mask projected onto wafer by photolithography
UNITED MICROELECTRONICS CORP3 citations60
US9256120B2Feb 9, 2016
Method of performing optical proximity correction for preparing mask projected onto wafer by photolithography
UNITED MICROELECTRONICS CORP0 citations49
US9147033B2Sep 29, 2015
Method of making photomask layout and method of forming photomask including the photomask layout
UNITED MICROELECTRONICS CORP0 citations45