Inventor

STIRTON JAMES BROC

US40 patents

⚠️ This page may combine multiple inventors who share the name “STIRTON JAMES BROC”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

STIRTON JAMES BROC

ADVANCED MICRO DEVICES INC

Methods of using adaptive sampling techniques based upon categorization of process variations, and system for performing same

Method and apparatus for controlling photolithography overlay registration

Method and apparatus for selecting wafer alignment marks based on film thickness variation

Method and apparatus for identifying misregistration in a complimentary phase shift mask process

Method and apparatus for performing overlay measurements using scatterometry

Method of measuring implant profiles using scatterometric techniques wherein dispersion coefficients are varied based upon depth

Method of identifying film stacks based upon optical properties

Method and apparatus for determining feature characteristics using scatterometry

Method and apparatus for periodic correction of metrology data

Method of controlling photolithography processes based upon scatterometric measurements of photoresist thickness, and system for accomplishing same

Method and apparatus for controlling a polishing process based on scatterometry derived film thickness variation

Method of controlling stepper process parameters based upon scatterometric measurements of DICD features

Method and apparatus for measuring planarity of a polished layer

Method of detecting degradation in photolithography processes based upon scatterometric measurements of grating structures, and a device comprising such structures

Method and apparatus for selecting sites for sampling

Methods of calibrating and controlling stepper exposure processes and tools, and system for accomplishing same

Method and system for advanced process control using a combination of weighted relative bias values

Method and apparatus for generating a polishing process endpoint signal using scatterometry

Method of using critical dimension measurements to control stepper process parameters

Method of correcting non-linearity of metrology tools, and system for performing same

Method of controlling stepper process parameters based upon optical properties of incoming process layers, and system for accomplishing same

Method of controlling photolithography processes based upon scatterometric measurements of sub-nominal grating structures

Method of controlling metal etch processes, and system for accomplishing same

Method and apparatus for metrology sampling using combination sampling rules

Method of monitoring anneal processes using scatterometry, and system for performing same

Structures for analyzing electromigration, and methods of using same

Method of using high yielding spectra scatterometry measurements to control semiconductor manufacturing processes, and systems for accomplishing same

Method of measuring implant profiles using scatterometric techniques

Method of using scatterometry measurements to control stepper process parameters

Method for calibrating optical-based metrology tools

Method of integrating scatterometry metrology structures directly into die design

Method of using scatterometry for analysis of electromigration, and structures for performing same

Method and system for advanced process control using measurement uncertainty as control input

GLOBALFOUNDRIES INC

Method and apparatus for compensating metrology data for site bias prior to filtering

Method and system for randomizing wafers in a complex process line

Method and apparatus for optimizing models for extracting dose and focus from critical dimension

Methods of error detection in fabrication processes

Methods of error detection in fabrication processes

ADVANCED MICRON DEVICES INC

Method of using scatterometry measurements to determine and control gate electrode profiles

CHAUHAN SIDDHARTH

Method and apparatus for extracting dose and focus from critical dimension data