Inventor
MIZOBATA IKUO
JP12 patents
⚠️ This page may combine multiple inventors who share the name “MIZOBATA IKUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOBE STEEL LTD
6 patentsUS7111630B2Sep 26, 2006
High pressure processing apparatus and method
KOBE STEEL LTD36 citations92
US6874513B2Apr 5, 2005
High pressure processing apparatus
KOBE STEEL LTD25 citations92
US6823880B2Nov 30, 2004
High pressure processing apparatus and high pressure processing method
KOBE STEEL LTD17 citations92
US6703316B2Mar 9, 2004
Method and system for processing substrate
KOBE STEEL LTD30 citations92
US7513265B2Apr 7, 2009
High pressure processing method and apparatus
KOBE STEEL LTD10 citations83
US7080651B2Jul 25, 2006
High pressure processing apparatus and method
KOBE STEEL LTD3 citations62
DAINIPPON SCREEN MFG
6 patentsUS6841031B2Jan 11, 2005
Substrate processing apparatus equipping with high-pressure processing unit
DAINIPPON SCREEN MFG44 citations92
US6691430B2Feb 17, 2004
High-pressure drying apparatus, high-pressure drying method and substrate processing apparatus
DAINIPPON SCREEN MFG39 citations92
US7384484B2Jun 10, 2008
Substrate processing method, substrate processing apparatus and substrate processing system
DAINIPPON SCREEN MFG18 citations82
US7000653B2Feb 21, 2006
High pressure processing apparatus and high pressure processing method
DAINIPPON SCREEN MFG1 citations62
US5865893AFeb 2, 1999
Spin coating apparatus
DAINIPPON SCREEN MFG3 citations62
US7252719B2Aug 7, 2007
High pressure processing method
DAINIPPON SCREEN MFG0 citations51